Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators.
- Additional Document Info
- View All
We demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2×10(5) at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits.
author list (cited authors)
Lin, H., Li, L., Zou, Y. i., Danto, S., Musgraves, J. D., Richardson, K., ... Hu, J.