Mid-infrared silicon platform for chip-scale chemical sensors Conference Paper uri icon


  • Mid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 urn (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.

author list (cited authors)

  • Lin, P. T., Lin, H., Singh, V., Patel, N. S., Hu, J., Richardson, K., ... Agarwal, A. M.

publication date

  • August 2013