Mid-infrared chemical sensors on-a-chip using air-clad pedestal silicon waveguides
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abstract
We demonstrate a chip-scale air-clad silicon pedestal waveguide as a Mid-Infrared sensor capable of in-situ monitoring of organic solvents. From changes in the waveguide mode intensities, identification of chemical compositions and concentrations is achieved. CLEO: 2013 Technical Digest OSA 2013.