Mid-infrared chemical sensors on-a-chip using air-clad pedestal silicon waveguides Conference Paper uri icon


  • We demonstrate a chip-scale air-clad silicon pedestal waveguide as a Mid-Infrared sensor capable of in-situ monitoring of organic solvents. From changes in the waveguide mode intensities, identification of chemical compositions and concentrations is achieved. CLEO: 2013 Technical Digest © OSA 2013.

author list (cited authors)

  • Lin, P. T., Singh, V., Hu, J., Richardson, K., Musgraves, J. D., Luzinov, I., ... Agarwal, A.

publication date

  • November 2013