Mid-infrared chemical sensors on-a-chip using air-clad pedestal silicon waveguides
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We demonstrate a chip-scale air-clad silicon pedestal waveguide as a Mid-Infrared sensor capable of in-situ monitoring of organic solvents. From changes in the waveguide mode intensities, identification of chemical compositions and concentrations is achieved. © OSA 2013.
author list (cited authors)
Lin, P. T., Singh, V., Hu, J., Richardson, K., Musgraves, J. D., Luzinov, I., ... Agarwal, A.