Direct‐Write Thermocapillary Dewetting of Polymer Thin Films by a Laser‐Induced Thermal Gradient
- Additional Document Info
- View All
A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.
author list (cited authors)
Singer, J. P., Lin, P., Kooi, S. E., Kimerling, L. C., Michel, J., & Thomas, E. L.