Direct‐Write Thermocapillary Dewetting of Polymer Thin Films by a Laser‐Induced Thermal Gradient Academic Article

abstract

• A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.

authors

• Lin, Paotai

altmetric score

• 7

author list (cited authors)

• Singer, J. P., Lin, P., Kooi, S. E., Kimerling, L. C., Michel, J., & Thomas, E. L.

citation count

• 35

publication date

• August 2013

publisher

• Wiley  Publisher

published in

• ADVANCED MATERIALS  Journal

keywords

• Dewetting
• Direct Write
• Pattern Transfer
• Thermocapillary Effect

PubMed Central ID

• 23963926

Digital Object Identifier (DOI)

• 10.1002/adma.201302777

start page

• 6100

end page

• 6105

volume

• 25

issue

• 42