Direct‐Write Thermocapillary Dewetting of Polymer Thin Films by a Laser‐Induced Thermal Gradient Academic Article uri icon

abstract

  • A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.

altmetric score

  • 7

author list (cited authors)

  • Singer, J. P., Lin, P., Kooi, S. E., Kimerling, L. C., Michel, J., & Thomas, E. L.

citation count

  • 35

publication date

  • August 2013

publisher