Silicon Nitride Based Mid-Infrared Microphotonics for Sensor Applications Conference Paper

abstract

• Integrated mid-infrared waveguides and directional couplers are demonstrated on silicon nitride (SiN) thin films by low-pressure chemical vapor deposition. The prepared SiN film has a broad spectral transparency from visible up to mid-infrared (mid-IR). The SiN waveguide shows a dominant fundamental mode with an optical loss of 2.1 dB/cm at = 3.7 m. In addition, we demonstrate an efficient SiN directional coupler with an 8 dB extinction ratio upon wavelength sweep between = 3.55 m to = 3.75 m. With the inherent advantage of complementary metal-oxide-semiconductor (CMOS) compatibility, our SiN platform paves the way to create sophisticated photonic circuits that are desired for chip-scale mid-IR biochemical sensors. 2013 IEEE.

name of conference

• 2013 IEEE SENSORS

authors

• Lin, Paotai

published proceedings

• 2013 IEEE SENSORS

author list (cited authors)

• Lin, P. T., Singh, V., Kimerling, L., & Agarwal, A. M.

citation count

• 2

complete list of authors

• Lin, Pao Tai||Singh, Vivek||Kimerling, Lionel||Agarwal, Anuradha Murthy

publication date

• November 2013

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• Proceedings of IEEE Sensors  Journal

keywords

• Broad Spectral Transparency
• CMOS Compatibility
• CMOS Integrated Circuits
• Chemical Vapour Deposition
• Chip-scale Mid-IR Biochemical Sensor
• Complementary Metal-oxide-semiconductor Compatibility
• Directional Coupler
• Directional Couplers
• Dominant Fundamental Mode
• Films
• Gain 8 DB
• Infrared Detectors
• Integrated Midinfrared Waveguide
• Integrated Optoelectronics
• Low-pressure Chemical Vapor Deposition
• Micro-optics
• Microfabrication
• Microsensors
• Midinfrared Microphotonics
• Optical Device Fabrication
• Optical Directional Couplers
• Optical Fabrication
• Optical Films
• Optical Loss
• Optical Sensors
• Optical Waveguides
• Photonic Circuit
• Silicon
• Silicon Compounds
• Sin
• Thin Film
• Thin Film Sensors
• Wavelength 3.55 Mum To 3.75 Mum

Digital Object Identifier (DOI)

• 10.1109/icsens.2013.6688617

International Standard Book Number (ISBN) 13

• 9781467346405

start page

• 1

end page

• 4

URL

• http%3A%2F%2Fdx.doi.org%2F10.1109%2Ficsens.2013.6688617