Mid-infrared materials and devices on a Si platform for optical sensing.
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In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiN x waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.
author list (cited authors)
Singh, V., Lin, P. T., Patel, N., Lin, H., Li, L., Zou, Y. i., ... Agarwal, A. M
complete list of authors
Singh, Vivek||Lin, Pao Tai||Patel, Neil||Lin, Hongtao||Li, Lan||Zou, Yi||Deng, Fei||Ni, Chaoying||Hu, Juejun||Giammarco, James||Soliani, Anna Paola||Zdyrko, Bogdan||Luzinov, Igor||Novak, Spencer||Novak, Jackie||Wachtel, Peter||Danto, Sylvain||Musgraves, J David||Richardson, Kathleen||Kimerling, Lionel C||Agarwal, Anuradha M