Mid-Infrared Chemical Sensors On-a-Chip Using Air-clad Pedestal Silicon Waveguides
Additional Document Info
We demonstrate a chip-scale air-clad silicon pedestal waveguide as a Mid-Infrared sensor capable of in-situ monitoring of organic solvents. From changes in the waveguide mode intensities, identification of chemical compositions and concentrations is achieved. 2013 The Optical Society.