Inverted-Rib Chalcogenide Waveguides by Solution Process
- Additional Document Info
- View All
© 2014 American Chemical Society. (Graph Presented) This paper studies the fabrication and characterization of solution-processed chalcogenide waveguides by a microtrench filling method. In this process, channels are etched on substrates and backfilled with solution-dissolved arsenic sulfide before being annealed. The waveguides are homogeneous in elemental composition and have good mode confinement. Both simulation and experimental measurements confirm a dominant fundamental mode covering 2.5-2.8 μm. We measure an optical loss of 1.87 dB/cm, which to our knowledge is the lowest among solution-processed waveguides.
author list (cited authors)
Zha, Y., Lin, P. T., Kimerling, L., Agarwal, A., & Arnold, C. B.