On-chip mid-infrared gas detection using chalcogenide glass waveguide
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© 2016 AIP Publishing LLC. We demonstrate an on-chip sensor for room-temperature detection of methane gas using a broadband spiral chalcogenide glass waveguide coupled with off-chip laser and detector. The waveguide is fabricated using UV lithography patterning and lift-off after thermal evaporation. We measure the intensity change due to the presence and concentration of methane gas in the mid-infrared (MIR) range. This work provides an approach for broadband planar MIR gas sensing.
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Han, Z., Lin, P., Singh, V., Kimerling, L., Hu, J., Richardson, K., Agarwal, A., & Tan, D
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Han, Z||Lin, P||Singh, V||Kimerling, L||Hu, J||Richardson, K||Agarwal, A||Tan, DTH
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