On-chip mid-infrared gas detection using chalcogenide glass waveguide
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© 2016 AIP Publishing LLC. We demonstrate an on-chip sensor for room-temperature detection of methane gas using a broadband spiral chalcogenide glass waveguide coupled with off-chip laser and detector. The waveguide is fabricated using UV lithography patterning and lift-off after thermal evaporation. We measure the intensity change due to the presence and concentration of methane gas in the mid-infrared (MIR) range. This work provides an approach for broadband planar MIR gas sensing.
author list (cited authors)
Han, Z., Lin, P., Singh, V., Kimerling, L., Hu, J., Richardson, K., Agarwal, A., & Tan, D.