On-chip mid-infrared gas detection using chalcogenide glass waveguide Academic Article uri icon

abstract

  • © 2016 AIP Publishing LLC. We demonstrate an on-chip sensor for room-temperature detection of methane gas using a broadband spiral chalcogenide glass waveguide coupled with off-chip laser and detector. The waveguide is fabricated using UV lithography patterning and lift-off after thermal evaporation. We measure the intensity change due to the presence and concentration of methane gas in the mid-infrared (MIR) range. This work provides an approach for broadband planar MIR gas sensing.

altmetric score

  • 1.35

author list (cited authors)

  • Han, Z., Lin, P., Singh, V., Kimerling, L., Hu, J., Richardson, K., Agarwal, A., & Tan, D.

citation count

  • 83

publication date

  • April 2016