Simulations of Dislocation Dynamics in Aluminum Interconnects Conference Paper uri icon

abstract

  • AbstractA discrete dislocation simulation of plastic deformation in metallic interconnects caused by thermal stress is carried out. The calculations are carried out using a two dimensional plane strain formulation with only edge dislocations. A boundary value problem is formulated and solved for the evolution of the thermal stress field and the evolution of the dislocation structure in the cross-section of the line as cooling proceeds. For lines with a small cross section (height or width less than 1 m), the local concentration of stresses due to dislocation patterning strongly affects the overall stress build up and relaxation. The results show a clear dependence of the transverse stress development on the line aspect ratio.

published proceedings

  • MRS Proceedings

author list (cited authors)

  • Nicola, L., Giessen, E., & Needleman, A.

publication date

  • January 1, 2002 11:11 AM