Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry. Academic Article uri icon


  • Ellipsometry is often used to determine the refractive index and/or the thickness of a polymer layer on a substrate. However, simultaneous determination of these parameters from a single-wavelength single-angle measurement is not always possible. The present study determines the sensitivity of the method to errors of measurement for the case of phase modulated ellipsometry and identifies conditions for decoupling film thickness and refractive index. For a specific range of film thickness, both the thickness and the refractive index can be determined from a single measurement with high precision. This optimal range of the film thickness is determined for organic thin films, and the analysis is tested on hydrogel-like polymer films in air and in water.

published proceedings

  • J Opt Soc Am A Opt Image Sci Vis

author list (cited authors)

  • Pristinski, D., Kozlovskaya, V., & Sukhishvili, S. A.

citation count

  • 54

complete list of authors

  • Pristinski, Denis||Kozlovskaya, Veronika||Sukhishvili, Svetlana A

publication date

  • January 2006